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A comparative study of integrated ferroelectric polymer pyroelectric sensors.

Setiadi, D, Binnie, David, Armitage, Alistair, Benjamin, Kenneth and Weller, H (1998) A comparative study of integrated ferroelectric polymer pyroelectric sensors. Integrated ferroelectrics, 19 (1-4). pp. 33-47. ISSN 1058-4587

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Abstract/Description

This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers. Two deposition technologies of PVDF and VDF/TrFE copolymer, both compatible with IC manufacturing, are presented. A 9 μm PVDF film is bonded on a silicon substrate using a capacitive acrylic thin film and a i μm VDF/TrFE copolymer is coated directly using a spin-coating technique. The theoretical response of both PVDF and VDF/TrFE pyroelectric sensors are calculated and related to the measured values. Peak responsivities of 4.5 V/W at 200 Hz and 3 V/W at 1kHz have been achieved for the pyroelectric sensors based on PVDF AND VDF/TrFE copolymer, respectively. Despite the responsivity of PVDF being slightly higher than that of the VDF/TrFE copolymer, the choice of which polymer to use will depend on the application and the preferred processing route

Item Type: Article
Print ISSN: 1058-4587
Electronic ISSN: 1607-8489
Uncontrolled Keywords: Pyroelectric sensor; PVDF; VDF/TrFE copolymer;
University Divisions/Research Centres: Faculty of Engineering, Computing and Creative Industries > School of Computing
Dewey Decimal Subjects: 600 Technology > 620 Engineering > 621 Electronic & mechanical engineering > 621.3 Electrical & electronic engineering
Library of Congress Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Item ID: 3216
Depositing User: Computing Research
Date Deposited: 29 Jul 2010 15:40
Last Modified: 18 Sep 2013 14:04
URI: http://researchrepository.napier.ac.uk/id/eprint/3216

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